CONVAC, Model 6000 Photoresist Developer

No. 1711

Asking Price: 18,500 Euro

Lithographic process system with flexible material flow, modular design and high throughput.
Process modules with pick and place robot handling for wafers as well as for a variety of other substrates up to 150 mm (6".
Set up for 75mm and 100mm (3" and 4") wafers. (optional 150mm (6")

Small footprint, only 700mm (28") wide, 1200mm (48") deep.

System consists of:
*Sender/Receiver module for Standard Cassettes
*Developer Module for positive, PMMA and negative developer
* Frogleg Robot
* Hotplate
* Coolplate

Kuhnke 653 W Programmable Process Controller and ILONA menu controller at operator interface, onscreen operator guidance, single wafer data acquisition and record keeping, Host computer and CIM interface (SECS I/II)

SN: VS 11206
Vintage 1995