BALZERS UMS 500 Ultra High Vacuum Evaporator with 2 E-Guns and Ion Source

No. 3456

Special Ultra High Vacuum System with a pressure < 3x 10e-11mbar
1x Balzers Electron Beam Power Supply EHV 110A
2x Balzers Electron Gun Control EKS 110A
1x Balzers RTC 110 Rate Controller
2x Balzers ES300 E-Guns
1x Balzers Ion Gauge Control IMG 070
1x Balzers Sublimation Control USS 110
1x Balzers UMS Control UMC 101
1x Pfeifer Turbo Pump Power Supply TCP 300
1x Balzers Heater Control Unit UAS 301
1x Advanced Energy ID 2500 Ion Beam Drive
1x Ion Beam Source
1x Balzers Quadrupole Mass Spectrometer QMG511
1x Varian TSP control Unit Model VT922-0052
1x Balzers Temperature Control Unit 0° to 400°C

Water Distributor Rack

complete Documentation with drawing and schematics