Diffusion Furnaces / LPCVD / PECVD/ RTP

CENTROTHERM Type DO 7.500-650-CANtrol High Temperature Continuous-Flow Furnace

No. 4532

Consisting of:
- Process chamber
- Heating
- Process atmosphere
- The flow meter can be monitored with photocells. For large deviations of the adjusted flows, an alarm is triggered.
- Cooling
- Control / control

Specifications:
Power: 100 kW
Total length: 800cm
Width: 50cm
Height: 80cm
In the panels 210cm
Exhaust: 150m ³ / h
Cooling water consumption: 50 l / min
Drop in pressure: 4 bar
Inlet temperature: 20 ° C
Process temperature: 950 ° C

Year built: 2003