LEITZ ERGULUX Inspection Microscope with CD2 line width measuring system

No. 4574

LEITZ ERGOLUX Microscope

- X/Y Stages with 156mm travel
- Wafersize from 3" to 6"
- Motorized objective nosepiece.
- Forwardly-placed viewing port.
- Automatic control microscope illumination
- Adapter for CD Camera on top

Periplan GF 10x/18 Occular
ICR NPL 5x/0,09
ICR NPL FLUOTAR 10x/0,22
ICR LL 20x/0,40
ICR NPL FLUOTAR 50x/0,85
ICR NPL FLUTAR 100x/0,90

Incl. Incident Light Interference Contrast (ICR)

CD2 Module with ELMES Software 5.1
Pentium PC with 17" TFT Monitor and Keyboard and Mouse

1 set of manuals