KLA TENCOR 2132 Wafer Inspection System

No. 2473

General Description
The KLA 2132 is capable of inspecting at the following rates:

- Speed: 5 sec/cm² Sensitivity: 0.62
- Speed: 15 sec/cm² Sensitivity: 0.39
- Speed: 30 sec/cm² Sensitivity: 0.25

and includes the following:
- Wafer Inspection Module for 4, 5, 6 or 8 inch wafer size
- image Computer
- Minimum inspectable feature size of 0.25µm in DIE to DIE mode
- Defect Clustering and Auto Review
- Sampling Blanket Wafer Inspection
- Automated Inspection Automatic Focusing
- SECS-GEM
- KLA SAT segmented auto threshold imaging processing hardware and software using mean and range functions on the KLA 2132 and KLA 2135 platforms that allows.
-- Improved inspection performance on noisy surfaces like CMP and metal reduced inspection setup time enhanced threshold algorithm for all process levels
-- KLA ADC Automated Defect classification Package
Includes image processing and analysis software for inspection station .
-- The system has internally two computers:
--- one is the system computer, which controls the machine in run mode
--- and the other is the ADC computer, which controls the machine in automatic review mode (you can also do manual review mode). The ADC Manager is not included.
- Fully automatic, non-contact wafer alignment Uses image recognition without special test site requirement
- Accomodates SEMI standard 25 wafer cassettes
- Uses pick-and-place, random access wafer handling system
- Image hard copy
- Remote image access XV
- Tencor 6000 loader

Substrates: For silicon wafers conforming to SEMI standard M1.1 Wafer diameter (mm): 100 100 125 150 200 Wafer thickness (µm): 525 625 625 675 725

SENSITIVITY AND INSPECTION SPEED:
DIE to DIE Mode Cell to Cell Mode Sensitivity (µm)
Speed (sec/cm²) Sensitivity (µm) Speed (sec/cm²) 0.60 05 0.50 1.5 0.40 15 0.30 05 0.25 30 0.20 15

KLA2132 Board Configuration
MAIN CARD CAGE DP 710-683424-001 REV AA DF 710
-661726-00 BD1 API 710-658036-00 REV C1 API 710
-658041-20 REV E0 UP 710-658046-00 REV F0 XINT 710
-658176-00 REV A0 YINT 710-658172-00 REV H0 XINT 710
-658176-00 REV A0 YINT 710-658172-00 REV H0 CT 710
-655651-20 REV C0 CT 710-655651-20 REV C0 MM 710
-659412-00 REV C0 MM 710-659412-00 REV C0 MC 710
-658232-20 REV H0 IF1 710-658086-20 REV E0 AUXILIARY

CARD CAGE
-DF 710-678525-001 REV AB DD 710-650044-20 REV DB0 - DP 710-678545-00 REV B1 RTF 710-652840-20 REV D3 710-659485-20 REV??

Manufactured: August 1995
The system was deinstalled by KLA and barrier bagged in september 2002 and until that date, was upgraded with various hardware and software upgrades.

Full performance specifications are available on request

S/N W21XX639
Facilities: 120V 3 phase 25A per phase