Optical Microscopes, Scanning Electron Microscopes

LEITZ ERGULUX Inspection Microscope

No. 1792

- Leitz 6" X/Y stages
- Wafersize from 3" to 6"
- Motorized objective nosepiece.
- Forwardly-placed viewing port.
- Measurement supervision via a TV monitor.
- Automatic control microscope illumination

Periplan GF 10x/18 Occular
NPL 5x/0.09DF Objective
NPL 10x/0.20DF Objective
NPL 20x/0.45DF Objective
NPL 50x/0.85DF Objective
NPL 100x/0.90DF Objective

1 set of manuals

LEITZ ERGULUX AMC Inspection Microscope

No. 2794


- X/Y Stages with 156mm travel
- Wafersize from 3" to 6"
- Motorized objective nosepiece.
- Forwardly-placed viewing port.
- Automatic control microscope illumination
- Adapter for CD Camera on top
- Colour CCD Camera with 17" Monitor

Periplan GF 12.5x/MF Occular
NPL 8x/0.18 Objective
NPL 16x/0.30 Objective
NPL 40x/0.65 Objective
NPL 80x/0.95 Objective

1 set of manuals

WILD M3Z Zoom Inspection Microscope

No. 4459

including 2 light sources

LEITZ ERGULUX AMC Inspection Microscope for large substrates

No. 4572


- X/Y Stages with 360x360 (mm) travel
- View field with ilumination from the bottom 250x250 (mm)
- Motorized objective nosepiece.
- Forwardly-placed viewing port.
- Automatic control microscope illumination
- ICR option (Interference Contrast Reflection
(Nomarski Princible))
- Adaptor for CD Camera on top
- LEICA DFC 290 CCD Camera
- DELL PC with 17" Monitor
- SDI uView Software
- Top and bottom light source

Periplan GF 10x/MF Occular

NPL Fluotar 5x/0.09 DF Objective
NPL 10x/0.20 Objective
NPL Fluotar 20x/0.45 DF Objective
NPL Fluotar 50x/0.60 DF Objective
NPL Fluotar 100x/0.90 DF Objective

JOEL WINSEM JSM 6400 Scanning Electron Microscope

No. 4769

The JEOL JSM-6400F field-emission scanning electron microscope (FESEM) is a high resolution cold field emission SEM.

This instrument generally requires that samples either be conductive or coated with a conductor. ( It is possible to image insulators at the charge balance point, but this requires considerable user skill.) Images are collected with an Everhart-Thornley secondary electron detector.

The JEOL JSM-6400F FESEM is equipped with an Everhard-Thornley secondary electron detector and a GW specimen current meter. Electrical feedthroughs are also mounted on the chamber to allow powering active electrical devices or observing electron beam induced current (EBIC). Using electrical feedthroughs, various researchers have interfaced testing equipment inside the FESEM including a nanomanipulator and a tensile testing cell. A 4Pi Universal Spectral Engine (electronics set) allows for digital data collection from all of the detectors.
Equipment Specifications

Everhart-Thornley secondary electron detector
GW Specimen current meter


Digital imaging of secondary electron images (topographical contrast)
Digital imaging of specimen current
EBIC (assumes a means of electrically connecting to the sample!)

Accelerating Voltage

0.5 - 30 kV


10X - 500,000X (39mm and <10mm working distances required respectively)

Resolution (SE)

15 Angsroms @ 30kV and 8mm working distance

Working Distance

3-53 mm focusable (<8mm not recommended due to detector geometry considerations)

Specimen Stage

Eucentric tilt -5° to +60º
Rotate 360º
x = 100 mm
y = 110 mm
z = 34 mm, stage based working distance adjustable from 5mm - 39mm

Specimen Considerations

Conductors and Semiconductors are directly observable. Insulators generally require a thin coating of conductive material. Wet and/or oily samples must be dried and free of volatile compounds before insertion into the instrument chamber.
Specimens can be up to 150mm in diameter and up to 20mm thick
Only the center 100x110mm area can be observed on large specimens

OLYMPUS MHL-525MS Micro-Macro Inspection System for large Substrates

No. 5389

This equipment is a microscope in which the macro illumination system and the coordinate reading spot illumination system are arranged on an electrically operated large-sized stage; the equipment has the following special characteristics:

1. Defects (scar, dirt, etc.) discovered under macro illumination can be registered by means of a switch, and the defect can immediately be closely observed through the microscope.

2. Through the electrically operated stage, programmed moving operations of the observation location are available.

3. The air spring type vibration-isolation table equipped with an automatic leveling function enables steady and stable microscopic observations even when a lens of high magnification is used.

4. Observation under transmitted illumination (bright field) and incident illumination (bright and dark fields, simplified polarization) is available; the object lens of a very long working distance is used; the focusing revolver unit is used that allows focusing without the need to move the work vertically; the optical system suited to the liquid-crystal board is adopted.

This equipment consists of the following units having the functions described below.
1.) System control unit
Governs and controls the equipment as a whole.
2) Microscope unit
Consists of the electrically operated
large-sized stage and the microscope optical
3) Macro illumination
An illumination unit having a wide
illumination field using a metal halide
system lamp as a light source.
Various functions are available, such as
brightness adjustment, by means of the
"ND filter";
selection of the wavelength by means of
color filters;
switchover of converged light and scattered
and adjustment of the illumination angle.
4) Coordinate reading spot
Illuminates the specified spots for reading
the coordinate during macro illumination
system illumination.
This system is equipped with a TV camera that
enables zoomed-in observation of the spot.
5) Vibration-isolation table
Prevents the microscope from vibrating,
and secures stable observation of the sample
and smooth movement of the stage.
It is equipped with a TV monitor table.
6) X/Y Stages
Ball Screw drive by means of AC servo motor
closed drive with high resolution linear
Mounting sample size: X 470mm, Y 370mm and
thickness of up to 1.1 mm

Outside dimensions: 3100x1700x2100 (mm) WxDxH
Weight: approx: 300 kg incl. the vibration-isolation table