JOEL WINSEM JSM 6400 Scanning Electron Microscope

No. 4769

The JEOL JSM-6400F field-emission scanning electron microscope (FESEM) is a high resolution cold field emission SEM.

This instrument generally requires that samples either be conductive or coated with a conductor. ( It is possible to image insulators at the charge balance point, but this requires considerable user skill.) Images are collected with an Everhart-Thornley secondary electron detector.

The JEOL JSM-6400F FESEM is equipped with an Everhard-Thornley secondary electron detector and a GW specimen current meter. Electrical feedthroughs are also mounted on the chamber to allow powering active electrical devices or observing electron beam induced current (EBIC). Using electrical feedthroughs, various researchers have interfaced testing equipment inside the FESEM including a nanomanipulator and a tensile testing cell. A 4Pi Universal Spectral Engine (electronics set) allows for digital data collection from all of the detectors.
Equipment Specifications

Everhart-Thornley secondary electron detector
GW Specimen current meter


Digital imaging of secondary electron images (topographical contrast)
Digital imaging of specimen current
EBIC (assumes a means of electrically connecting to the sample!)

Accelerating Voltage

0.5 - 30 kV


10X - 500,000X (39mm and <10mm working distances required respectively)

Resolution (SE)

15 Angsroms @ 30kV and 8mm working distance

Working Distance

3-53 mm focusable (<8mm not recommended due to detector geometry considerations)

Specimen Stage

Eucentric tilt -5° to +60º
Rotate 360º
x = 100 mm
y = 110 mm
z = 34 mm, stage based working distance adjustable from 5mm - 39mm

Specimen Considerations

Conductors and Semiconductors are directly observable. Insulators generally require a thin coating of conductive material. Wet and/or oily samples must be dried and free of volatile compounds before insertion into the instrument chamber.
Specimens can be up to 150mm in diameter and up to 20mm thick
Only the center 100x110mm area can be observed on large specimens