RF-Generators, Magnetrons Power Supplies, Lasers

No. 1401

Asking Price: 1,500 Euro

2800 Watt of continuous RF-Power, 50 Ohm output impedance, Type HN output connector, water cooled Dimensions: 425 x 560 x 350 (mm) WxDxH, weight 64 kg completely refurbished !

No. 1403

Asking Price: 1,200 Euro

2500 Watt of continuous RF-Power, 50 Ohm output impedance, Type HN output connector, water cooled Dimensions: 425 x 560 x 350 (mm) WxDxH, weight 64 kg completely refurbished !

No. 1404

Asking Price: 1,950 EURO

2800 Watt of continuous RF-Power,
50 Ohm output impedance,
Type HN output connector,
Water cooled
Dimensions: 460x600x500 (mm) WxDxH,
Weight 64 kg

No. 1405

Asking Price: 3,500 Euro

2500 Watt of continuous RF-Power, 50 Ohm output impedance, Type HN output connector, water cooled Includes Batteries for extended life Dimensions: 425 x 560 x 350 (mm) WxDxH, weight 64 kg

No. 6003

Asking Price: 3650 Euro

Output Power 15kW
208V, 3 Phase

No. 6027

Asking Price: 2500 Euro

No Display
15kW DC Power Supply
208V, 62A, 50/60Hz
Model No. 3152319-000C
S/N 56804

No. 6028

Asking Price: 2500 Euro

No Display
15kW DC Power Supply
208V, 62A, 50/60Hz
Model No. 3152319-000C
S/N 57528

No. 6029

Asking Price: 2500 Euro

No Display
15kW DC Power Supply
208V, 62A, 50/60Hz
Model No. 3152319-000C
S/N 57400

No. 6030

3000 Watt
15.56MHz
208V, 3 phase

including cables and automatching unit

No. 6031

3000 Watt
15.56MHz
208V, 3 phase

including cables and automatching unit

No. 6032

Output 3000 Watt
15.56MHz
208V, 3 Phase
with Daihin Type RMN-30D Automatching Unit
incl. cables

No. 6033

Asking Price: 950 Euro

Advanced Energy Sparc-le 20 DC Pulsing Arc Handling Accessory for MDX Series Power Supplies

Description:
The Sparc-le 20 accessory is for AE MDX DC Power Supplies output currents under 25 A. In response to today's demand for improved film quality with fewer defects, the Sparc-le 20 unit accessory provides exceptional arc repression capability by preventing the formation of arcs. It's also a cost-effective method to improve sputtered film quality.

The Sparc-le 20 unit clears arcs in 5 ms and dramatically reduces the number of hard arcs, resulting in reduced particulates and increased process time. Its small size allows for easy integration into existing systems with both old and new MDX products.

Process Improvements:
* A decrease in uniformity defects in some ZnO and Al2O3 processes
* Virtual elimination of particulates in some aluminum processes
* A 50% reduction in defect rate in carbon sputtering processes
* Improved film quality
* Increased throughput due to the ability to operate at higher powers
* Fewer and softer nodule formations on carbon targets
* Higher deposition rates in reactive processes

Benefits:
* Reduced arcing
* Reduced particulates
* Improved uniformity
* Improved sputter yields
* Higher throughput
* Reduced target contamination
* Wider process latitude

SPARC-LE 20 Specifications,

AC Input Voltage: 90-126.5 Vac RMS,50/60Hz,single phase,30VA
180-253 Vac RMS, 50/60Hz,single phase, 30VA,

DC Input Voltage: Any low-Z or standard-Z output from an MDX magnetron supply with output current below 1.5A

DC Current: 25 A steady state maximum; no minimum
current is required for operation
The supervisory circuit requires a
minimum of 1.5A before it is
operational

DC Input and Output Connectors: UHF type, female,
Amphenol part number 83- lR

Cable Connector for DC Input and Output: UHF type, male, Amphenol part number 83-822

DC Input and Output Cables: RG-8U coaxial cable; output cable from the unit to chamber not to exceed 6m (20')

Input and Output DC Polarity: Negative output (positive at ground, Negative output (positive floating less than 100V from ground)

Arc-Handling Characteristics: 40,000 arcs/s maximum; 5-7 ms typical arc recovery time;
1,800V absolute maximum input DC voltage
150V minimum to 1000 V maximum output
operating range; 5-20 ms delay before
next arc can be processed

Dimensions: 132.08mm (H) x 482.6mm (W) x 175.26mm
5.2" (H) x 19" (W) x 6.9" (D)
Weight: 7.7kg (17 lb) maximum

No. 6034

Asking Price: 950 Euro

Advanced Energy Sparc-le 20 DC Pulsing Arc Handling Accessory for MDX Series Power Supplies

Description:
The Sparc-le 20 accessory is for AE MDX DC Power Supplies output currents under 25 A. In response to today's demand for improved film quality with fewer defects, the Sparc-le 20 unit accessory provides exceptional arc repression capability by preventing the formation of arcs. It's also a cost-effective method to improve sputtered film quality.

The Sparc-le 20 unit clears arcs in 5 ms and dramatically reduces the number of hard arcs, resulting in reduced particulates and increased process time. Its small size allows for easy integration into existing systems with both old and new MDX products.

Process Improvements:
* A decrease in uniformity defects in some ZnO and Al2O3 processes
* Virtual elimination of particulates in some aluminum processes
* A 50% reduction in defect rate in carbon sputtering processes
* Improved film quality
* Increased throughput due to the ability to operate at higher powers
* Fewer and softer nodule formations on carbon targets
* Higher deposition rates in reactive processes

Benefits:
* Reduced arcing
* Reduced particulates
* Improved uniformity
* Improved sputter yields
* Higher throughput
* Reduced target contamination
* Wider process latitude

SPARC-LE 20 Specifications,

AC Input Voltage: 90-126.5 Vac RMS,50/60Hz,single phase,30VA
180-253 Vac RMS, 50/60Hz,single phase, 30VA,

DC Input Voltage: Any low-Z or standard-Z output from an MDX magnetron supply with output current below 1.5A

DC Current: 25 A steady state maximum; no minimum
current is required for operation
The supervisory circuit requires a
minimum of 1.5A before it is
operational

DC Input and Output Connectors: UHF type, female,
Amphenol part number 83- lR

Cable Connector for DC Input and Output: UHF type, male, Amphenol part number 83-822

DC Input and Output Cables: RG-8U coaxial cable; output cable from the unit to chamber not to exceed 6m (20')

Input and Output DC Polarity: Negative output (positive at ground, Negative output (positive floating less than 100V from ground)

Arc-Handling Characteristics: 40,000 arcs/s maximum; 5-7 ms typical arc recovery time;
1,800V absolute maximum input DC voltage
150V minimum to 1000 V maximum output
operating range; 5-20 ms delay before
next arc can be processed

Dimensions: 132.08mm (H) x 482.6mm (W) x 175.26mm
5.2" (H) x 19" (W) x 6.9" (D)
Weight: 7.7kg (17 lb) maximum

No. 6035

Asking Price: 950 Euro

Advanced Energy Sparc-le 20 DC Pulsing Arc Handling Accessory for MDX Series Power Supplies

Description:
The Sparc-le 20 accessory is for AE MDX DC Power Supplies output currents under 25 A. In response to today's demand for improved film quality with fewer defects, the Sparc-le 20 unit accessory provides exceptional arc repression capability by preventing the formation of arcs. It's also a cost-effective method to improve sputtered film quality.

The Sparc-le 20 unit clears arcs in 5 ms and dramatically reduces the number of hard arcs, resulting in reduced particulates and increased process time. Its small size allows for easy integration into existing systems with both old and new MDX products.

Process Improvements:
* A decrease in uniformity defects in some ZnO and Al2O3 processes
* Virtual elimination of particulates in some aluminum processes
* A 50% reduction in defect rate in carbon sputtering processes
* Improved film quality
* Increased throughput due to the ability to operate at higher powers
* Fewer and softer nodule formations on carbon targets
* Higher deposition rates in reactive processes

Benefits:
* Reduced arcing
* Reduced particulates
* Improved uniformity
* Improved sputter yields
* Higher throughput
* Reduced target contamination
* Wider process latitude

SPARC-LE 20 Specifications,

AC Input Voltage: 90-126.5 Vac RMS,50/60Hz,single phase,30VA
180-253 Vac RMS, 50/60Hz,single phase, 30VA,

DC Input Voltage: Any low-Z or standard-Z output from an MDX magnetron supply with output current below 1.5A

DC Current: 25 A steady state maximum; no minimum
current is required for operation
The supervisory circuit requires a
minimum of 1.5A before it is
operational

DC Input and Output Connectors: UHF type, female,
Amphenol part number 83- lR

Cable Connector for DC Input and Output: UHF type, male, Amphenol part number 83-822

DC Input and Output Cables: RG-8U coaxial cable; output cable from the unit to chamber not to exceed 6m (20')

Input and Output DC Polarity: Negative output (positive at ground, Negative output (positive floating less than 100V from ground)

Arc-Handling Characteristics: 40,000 arcs/s maximum; 5-7 ms typical arc recovery time;
1,800V absolute maximum input DC voltage
150V minimum to 1000 V maximum output
operating range; 5-20 ms delay before
next arc can be processed

Dimensions: 132.08mm (H) x 482.6mm (W) x 175.26mm
5.2" (H) x 19" (W) x 6.9" (D)
Weight: 7.7kg (17 lb) max