Wafer Sorter / Wafer Transfer Systems / Robots

No. 2471

up to 8" wafers
Computer controlled
CE Marked
SECS/GEM
LUDL ROBOT
JOYSTICK LUDL PN 73000361 MAC2 XYZ
JOYSTICK Controller LUDL PN 7300203 MAC22
18"Rack fitted with OCR
3 each 8" Wafer Cassette Loaders
Power 110/220V
Dimensions on base: 137x160x200 (cm) WxDxH
Weight 300 kg

No. 2475

Setup for 2 each PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2476

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2477

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2478

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2479

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2480

Asking Price: 2,100 Euro

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2481

Asking Price: 2,100 Euro

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2482

Asking Price: 2,100 Euro

- Setup for PA20079 MDI , (8" wafers)
- 110/220VAC, 50/60Hz
- CE Marked,
- Meets/Exceeds SEMI S2-93
- With Mitsubishi Melsec FX on 60MR controllers
- Two-Stage Wafer Transfer Platform
- Uses 80-90 PSI CDA or N2
- Weight 40.8 Kg
- Dimensions 266.7 x 635mm x 952mm (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 2483

Asking Price: 2,100 Euro

- Setup for PA200-79 MDI (8" Wafers)
- Power 110/220VAC 50/60Hz
- CE mark
- Meets/Exceeds SEMI S2-93,
- With Mitsubishi Melsec FX on 60MR controllers
-Uses 80-90 PSI CDA or N2 -
- Weight 40.8 Kg
- 8" wafer size
- Dimensions 500x550x950 (mm) WxDxH
- Stage width 508 mm
- System pressure 70 PSI
- Low particle generation designed series VI

No. 4567

he Comet 20 station is the easy way to transfer 25 wafers from cassette to cassette or cassette to boat.
This Comet is fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer's processing equipment.
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
Easy to integrate in your process line and customizable (OEM customer)
One button system operation
LCD display indicating all cycle steps
Set up machine directly from the keyboard